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Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing

US 11,348,784 In force
OverviewFamilyAssignmentsSources & methods

Term ends Dec 21, 2039 · High confidence

Filed Aug 22, 2019 as application 16/547,724 · Granted May 31, 2022
Base term plus 131 days of patent term adjustment (USPTO delay)
Today
20 years from filing
2019 2039
Clock starts
Aug 12, 2019
Term ends
Dec 21, 2039
Granted
May 31, 2022
base term patent term adjustment fee events Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
131
Days of term adjustment
Read from the USPTO patent term adjustment record, not recalculated here.
None
Terminal disclaimer
No disclaimer on this record.
1 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
5
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term runs 131 days past its 20-year base term on prosecution delay. 1 of 3 maintenance fees is paid so far. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Aug 12, 2019, when application 16/537,748, the earliest non-provisional in its chain, was filed (this one was filed Aug 22, 2019)Aug 12, 2039High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustment+131 days, USPTO patent term adjustment recordDec 21, 2039High confidence
Terminal disclaimer capNone on recordno cap appliedHigh confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events1 of 3 maintenance fees paidIn forceHigh confidence
Computed term endThe steps above, in orderDec 21, 2039High confidence

This family

Application 16/537,748Abandoned
not computed
not computed
US 11,348,784this patent
Dec 2039
Dec 2039
Application PCT/US2020/045757PCT application
no patent term
no patent term
US 11,848,204In force
Aug 2039
Aug 2039
US 12,347,677In force
Aug 2039
Aug 2039
The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Sep 30, 2019
Reel 50582, frame 796
Mattson Technology, Inc.Mattson Technology, Inc.; Beijing e-Town Semiconductor Technology, Co., Ltd.Assignment of Assignor's Interest
Sep 30, 2019
reel/frame not recorded
Mattson Technology, Inc.Mattson Technology, Inc.Assignment of Assignor's Interest
Sep 30, 2019
reel/frame not recorded
Mattson Technology, Inc.Beijing e-Town Semiconductor Technology, Co., Ltd.Assignment of Assignor's Interest
Oct 14, 2019
Reel 50703, frame 291
Savas, Stephen E.; Ma, ShawmingMattson Technology, Inc.Assignment of Assignor's Interest
Oct 14, 2019
Reel 50703, frame 582
Mattson Technology, Inc.Mattson Technology, Inc.; Beijing e-Town Semiconductor Technology, Co., Ltd.Assignment of Assignor's Interest
Oct 14, 2019
reel/frame not recorded
Mattson Technology, Inc.Mattson Technology, Inc.Assignment of Assignor's Interest
Oct 14, 2019
reel/frame not recorded
Mattson Technology, Inc.Beijing e-Town Semiconductor Technology, Co., Ltd.Assignment of Assignor's Interest
Feb 23, 2021
Reel 55370, frame 755
Mattson Technology, Inc.Mattson Technology, Inc.; Beijing e-Town Semiconductor Technology Co., Ltd.Assignment of Assignor's Interest
Feb 23, 2021
reel/frame not recorded
Mattson Technology, Inc.Mattson Technology, Inc.Assignment of Assignor's Interest
Feb 23, 2021
reel/frame not recorded
Mattson Technology, Inc.Beijing e-Town Semiconductor Technology Co., Ltd.Assignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

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