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Method of Manufacturing MEMS Devices Providing Air Gap Control

US 7,527,998 In force
OverviewFamilyAssignmentsSources & methods

Term ends Dec 7, 2026 · High confidence

Filed Jun 30, 2006 as application 11/478,702 · Granted May 5, 2009
Base term plus 160 days of patent term adjustment (USPTO delay)
Today
20 years from filing
2006 2026
Clock starts
Jun 30, 2006
Term ends
Dec 7, 2026
Granted
May 5, 2009
base term patent term adjustment fee events Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
160
Days of term adjustment
Read from the USPTO patent term adjustment record, not recalculated here.
None
Terminal disclaimer
No disclaimer on this record.
3 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
5
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term runs 160 days past its 20-year base term on prosecution delay. All three maintenance fees are recorded paid; no more fees are due. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Jun 30, 2006, when this application, 11/478,702, was filedJun 30, 2026High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustment+160 days, USPTO patent term adjustment recordDec 7, 2026High confidence
Terminal disclaimer capNone on recordno cap appliedHigh confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events3 of 3 maintenance fees paidIn forceHigh confidence
Computed term endThe steps above, in orderDec 7, 2026High confidence

This family

US 7,527,998this patent
Dec 2026
Dec 2026
Application PCT/US2007/011812PCT application
no patent term
no patent term
US 8,102,590Lapsed on the fee record
Jan 2020
Jan 2020
US 7,952,787Lapsed on the fee record
May 2019
May 2019
US 8,964,280Lapsed on the fee record
Feb 2019
Feb 2019
The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Jun 30, 2006
Reel 18066, frame 612
Tung, Ming-hau; Kogut, LiorQualcomm Mems Technologies, Inc.Assignment of Assignor's Interest
Jun 27, 2007
Reel 19493, frame 860
Qualcomm Mems Technologies, Inc.Qualcomm IncorporatedAssignment of Assignor's Interest
Feb 27, 2008
Reel 20571, frame 253
Qualcomm IncorporatedQualcomm Mems Technologies, Inc.Assignment of Assignor's Interest
Aug 31, 2016
Reel 39891, frame 1
Qualcomm Mems Technologies, Inc.Snaptrack, Inc.Assignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

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