The Patent Finder
US

Method for Reducing Metal Contamination and Film Deposition Apparatus

US 11,214,864 In force
OverviewFamilyAssignmentsSources & methods

Term ends Sep 25, 2035 · High confidence

Filed Mar 26, 2018 as application 15/935,580 · Granted Jan 4, 2022
Base term, 20 years from filing · capped by a resolved terminal disclaimer
Today
20 years from filing
2018 2038
Clock starts
Mar 26, 2018
Term ends
Sep 25, 2035
Granted
Jan 4, 2022
base term after the term ends fee events Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
None
Term adjustment
No prosecution delay on this record.
Capped
Terminal disclaimer
Resolved from the filed document, referencing US 10,290,476.
1 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
56
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term is its 20-year base term, with no adjustment for prosecution delay. A terminal disclaimer resolved from the filed document caps it earlier. 1 of 3 maintenance fees is paid so far. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Mar 26, 2018, when this application, 15/935,580, was filedMar 26, 2038High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustmentNone on fileno changeHigh confidence
Terminal disclaimer capDisclaimer resolved from the filed document (refs US 10,290,476)capped to Sep 25, 2035High confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events1 of 3 maintenance fees paidIn forceHigh confidence
Computed term endThe steps above, in orderSep 25, 2035High confidence

This family

US 11,214,864this patent
Sep 2035
Sep 2035
US 10,593,541In force
May 2038
May 2038
US 10,607,835In force
Nov 2036
Nov 2036
US 10,424,491In force
Nov 2036
Nov 2036
US 10,553,409In force
May 2038
May 2038
US 11,037,763In force
Dec 2038
Dec 2038
US 11,462,444In force
Aug 2038
Aug 2038
US 10,366,888In force
Jun 2038
Jun 2038
8 of 56 applications in this family shown, earliest filings first. The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Mar 28, 2018
Reel 45367, frame 927
Umehara, TakahitoTokyo Electron LimitedAssignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

The Patent Finder CompaniesExpirationsCalculatorWatchlistPricing MethodologyCorrectionsLegalPrivacysupport@thepatentfinder.com Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) Part of 137 Finder · © 2026 137 Finder LLC · Sources cited