6,315 patents currently held
107 more in force are now held by other companies
Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.
16 more records may belong here and await a decision; they are not counted.
The next term ends in Nov 2026. from the record
Free plan: 3 watched companies. Pro: unlimited.
Alerts on its grants, lapses and transfers.
621
Ending by 2030
Nov 2026
Next term end
5,473
Patent families
When these terms end
Held patents by the year their term ends
notable patents
fee due within 90 days
all others
Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
Notable: the highest-ranked patents in this portfolio by citations and family size. Fee due within 90 days: a maintenance fee is due within 90 days of when this page was computed and not yet paid.
Notable patents
Ranked by citations and family size, against patents of the same kind granted the same year. How we rank
Notable
Ends no later than Apr 2032 · Medium confidence
Also notable
Ends Oct 2036 · High confidence
Also notable
Ends Sep 2037 · High confidence
Film Deposition Apparatus, Substrate Processing Apparatus, Film Deposition Method, and Storage Medium
US 9,267,204
Cited by 845 later US patents, top 1% of utility patents granted in 2016 in our data, and renewed at every maintenance window due so far. Protection runs to 2032. A terminal disclaimer is on file and its reference is not resolved, so no cap is applied and the date may move earlier, never later.
Substrate Processing Apparatus and Susceptor
US 10,557,190
Cited by 488 later US patents, top 1% of utility patents granted in 2020 in our data. Protection runs to 2036.
Plasma Processing Apparatus
US 10,504,698
Cited by 371 later US patents, top 1% of utility patents granted in 2019 in our data. Protection runs to 2037.
Fee deadlines
Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.
- 17 fees due Nov 14 to 30, 2026 · next Nov 14
- 80 fees due Dec 2 to 30, 2026 · next Dec 2
- 94 fees due Jan 2 to 30, 2027 · next Jan 2
- 131 fees due Feb 1 to 28, 2027 · next Feb 1
- 87 fees due Mar 1 to 29, 2027 · next Mar 1
- 136 fees due Apr 1 to 30, 2027 · next Apr 1
- 87 fees due May 3 to 28, 2027 · next May 3
- 97 fees due Jun 1 to 30, 2027 · next Jun 1
- 124 fees due Jul 2 to 30, 2027 · next Jul 2
- 112 fees due Aug 2 to 27, 2027 · next Aug 2
- 113 fees due Sep 1 to 30, 2027 · next Sep 1
- 96 fees due Oct 2 to 30, 2027 · next Oct 2
- 42 fees due Nov 3 to 12, 2027 · next Nov 3
Recent changes
- Nov 5Assignment recorded on 1 record: Sakaguchi, Keisuke and 2 others to Tokyo Electron Limited Recorded Nov 5, 2026, executed Nov 2, 2026. Conveyance as recorded: Assignment of Assignor's Interest. A recorded assignment is a filed document, not a statement of current ownership. Reel 76642, frame 387.
- Sep 17Assignment recorded on 1 record: Ushida, Tenta and 3 others to Tokyo Electron Limited Recorded Sep 17, 2026, executed Sep 8, 2026. Conveyance as recorded: Assignment of Assignor's Interest. A recorded assignment is a filed document, not a statement of current ownership. Reel 76049, frame 62.
- 214 of the patents on this record were granted since Aug 16, 2026
- 66 terms have ended since Aug 16, 2026
What they patent
The 5 largest of its 5,473 families, grouped by real patent family and labeled by the earliest filing in each. No technology classification is inferred from titles.
| Method for Reducing Metal Contamination and Film Deposition Apparatus | 40 in force | to Dec 2040 |
| Radical Deactivation Component, Plasma Processing Apparatus Using the Same and Radical Deactivation Method | 34 in force | to Sep 2041 |
| Film Deposition Apparatus (2017) | 32 in force | to Sep 2040 |
| Method of Depositing a Film | 32 in force | to Sep 2037 |
| Film Deposition Apparatus (2009) | 32 in force | to Sep 2033 |
Patents held now
Soonest term end first.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 7,556,246 | Unloading Method of Object, Program Storage Medium, and Mounting Mechanism In force · High confidence | In force | High confidence | |
| US 7,566,365 | Liquid Processing Apparatus and Liquid Processing Method In force · High confidence | In force | High confidence | |
| US 7,729,798 | Substrated Processing System, and Method of Control Therefor, Control Program and Storage Medium In force · High confidence | In force | High confidence | |
| US 7,790,626 | Plasma Sputtering Film Deposition Method and Equipment In force · High confidence | In force | High confidence | |
| US 7,651,586 | Particle Removal Apparatus and Method and Plasma Processing Apparatus In force · High confidence | In force | High confidence | |
| US 7,794,350 | Turning Device for Heavy Object held by Tokyo Electron Limited and Nabtesco Corporation In force · High confidence | In force | High confidence | |
| US D672,377 | Dielectric Window for Plasma Processing Device In force · High confidence | In force | High confidence | |
| US 7,465,218 | Probe Polishing Method and Probe Polishing Member In force · High confidence | In force | High confidence | |
| US 7,482,269 | Method for Controlling the Step Coverage of a Ruthenium Layer on a Patterned Substrate In force · High confidence | In force | High confidence | |
| US 7,632,379 | Plasma Source and Plasma Processing Apparatus In force · High confidence | In force | High confidence |
Also on record, not counted in the 6,315: 107 patents in force now held by others · 2,849 patents ended · 2,008 applications pending · 2,622 applications abandoned. List them
Sources and methods
Compiled from USPTO application file histories, grants and recorded assignments, with the company's own names reviewed by hand. How this record was built
Portfolio grouped automatically from ownership conveyances to the names matched to this company, usually every name that begins with its own, so it counts patents an affiliate holds; each list row names the holder of record. Security interests are excluded and ambiguous records are not reviewed by hand.
Fee due within 90 days marks a patent with a maintenance fee due within 90 days of the date this page was computed and not yet recorded paid, so it can end earlier than the bar shows. A fee left unpaid ends the patent at the close of the six month grace period that follows its due date, not on the due date itself. It is not a prediction that the fee will be missed.
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.