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Film Deposition Apparatus, Substrate Processing Apparatus, Film Deposition Method, and Storage Medium

US 9,267,204 In force, term unresolved
OverviewFamilyAssignmentsSources & methods

Term ends no later than Apr 2, 2032 · Medium confidence

In force on USPTO's status record and by its fee record. A terminal disclaimer on file may shorten this term, possibly to a date already past; its reference document is unresolved, so the date above is an upper bound and no earlier date is guessed.

Filed Aug 28, 2009 as application 12/549,446 · Granted Feb 23, 2016
Base term plus 948 days of patent term adjustment (USPTO delay)
Today
20 years from filing
2009 2032
Clock starts
Aug 28, 2009
Ends no later than
Apr 2, 2032
Granted
Feb 23, 2016
base term patent term adjustment fee events Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
948
Days of term adjustment
Read from the USPTO patent term adjustment record, not recalculated here.
Unresolved
Terminal disclaimer
On file, reference document not resolved, so the date above is an upper bound. We do not guess the cap.
2 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
85
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term runs 948 days past its 20-year base term on prosecution delay. A terminal disclaimer is on file with no resolved reference, so no cap is applied and none is guessed. 2 of 3 maintenance fees are paid so far. Confidence: Medium. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Aug 28, 2009, when this application, 12/549,446, was filedAug 28, 2029High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustment+948 days, USPTO patent term adjustment recordApr 2, 2032High confidence
Terminal disclaimer capDisclaimer on file (filed), reference document not resolvedno cap applied, and none guessedMedium confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events2 of 3 maintenance fees paidIn forceHigh confidence
Computed term endThe steps above, in orderno later than Apr 2, 2032Medium confidence

This family

US 8,123,194Lapsed on the fee record
Feb 2020
Feb 2020
Application 12/076,975Abandoned
not computed
not computed
Application 12/147,707Abandoned
not computed
not computed
Application 12/238,692Abandoned
not computed
not computed
Application 12/304,324Abandoned
not computed
not computed
US 8,030,717Lapsed on the fee record
Oct 2015
Oct 2015
Application 12/410,492Abandoned
not computed
not computed
Application 12/487,719Abandoned
not computed
not computed
8 of 85 applications in this family shown, earliest filings first. The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Aug 28, 2009
Reel 23161, frame 36
Honma, ManabuTokyo Electron LimitedAssignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

The Patent Finder CompaniesExpirationsCalculatorWatchlistPricing MethodologyCorrectionsLegalPrivacysupport@thepatentfinder.com Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) Part of 137 Finder · © 2026 137 Finder LLC · Sources cited